2. The capacitance and coupling capacitance of three interconnects is shown in the figure
below (cross-section view). Cā = 10, C2 = 12, C3 = 10, C12= 2, C23 = 3. Write the
coupled capacitance matrix. (Units are ignored for the sake of simplicity)
R1
C1
77/
C12
R2
C2
C23
R3
C3
(3)