Compare the magnitudes of forces for a 10 μm silica particle.
-Fg = gρpπd3/6 = 1.2 x 10-11 N (on oxidized wafer).
-Fd = 3μaπdpua = 1.8 x 10-9 N (ua = 1 m/s).
-Fi = ρaπdp2ua2/4 = 9.4 x 10-11 N (ua = 1 m/s).
-Fv = Nbq2/4πε0εrr2 = 2.3 x 10-8 N (for 100 bonds) or Amdp1dp22((dp1+dp2)12r2) = 4.2 x 10-8 N (for two 10 μm particles at 1 nm).
Fe = Q1Q2/4πε0εrr2 = 2.3 x 10-10 N (for 1 mm separation, 106 charges).
-Fa = 1.01 x 105π(dp2)/2 = 1.6 x 10-5 N.
What will the particle do under these circumstances? Is the particle going to fly off the surface, be blown along the surface, or not move?
Compare the magnitudes of forces for a 10 μm silica particle. Ua Fg = gρpπd3/6 = 1.2 x 10-11 N = Fr. -Airflow - Ff = sF = 1.2 x 10-11 N (on oxidized wafer). -Fd = 3πrd.ua = 1.8 x 10-9 N (ua = 1 m/s) F = ρatrd2u2/4 = 9.4 x 10-11 N (ua = 1 m/s). What will the particle do Fy = Nbq2/4πε0εrr2 = 2.3 x 10-8 N (for 100 under these bonds) or Amdp1dp2/(dp1+dp2)12r2) = 4.2 x circumstances? 10-8 N (for two 10 μm particles at 1 nm). Fe = Q1Q2/4πε0εrr2 = 2.3 x 10-10 N (for 1 mm separation, 106 charges) Fa = 1.01 x 105πd2/2 = 1.6 x 10-5 N.