Question

For a 100 keV boron implant with a dose of $5 \times 10^{14} \text{cm}^{-2}$, calculate peak concentration. Solution: From Fig. 6a, $R_p = 0.31 \text{ µm}$ and $\sigma_p = 0.07 \text{ µm}$

          For a 100 keV boron implant with a dose of $5 \times 10^{14} \text{cm}^{-2}$,
calculate peak concentration.
Solution:
From Fig. 6a, $R_p = 0.31 \text{ µm}$ and $\sigma_p = 0.07 \text{ µm}$

For a 100 keV boron implant with a dose of 5 × 10^14cm^-2,
calculate peak concentration.
Solution:
From Fig. 6a, Rp = 0.31 µm and = 0.07 µm

Added by Sandra J.

University Physics with Modern Physics

Hugh D. Young 14th Edition

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For a 100 keV boron implant with a dose of 5 1014 cm2 calculate peak concentration Solution; From Fig.6a,R=0.31m and =0.07m

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Question

For a 100 keV boron implant with a dose of $5 \times 10^{14} \text{cm}^{-2}$, calculate peak concentration. Solution: From Fig. 6a, $R_p = 0.31 \text{ µm}$ and $\sigma_p = 0.07 \text{ µm}$

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