Question

1. (6 points) X-ray lithography dose. For 1keV x-ray\\ ($\lambda$=1.24nm), absorption coefficient for Au is $\alpha_{Au}$=8 µm$^{-1}$,\\ and that for PMMA is $\alpha_{PMMA}$=0.3 µm$^{-1}$. If the thickness of\\ PMMA is 3µm, and that of Au is 0.6 µm. What is the\\ volume dose (J/cm$^3$) at point A (see figure at right, A is at\\ the bottom of PMMA, below Au) if the intensity from\\ synchrotron radiation is 50 mW/cm$^2$ and exposure time is 40\\ sec?

          1. (6 points) X-ray lithography dose. For 1keV x-ray\\
($\lambda$=1.24nm), absorption coefficient for Au is $\alpha_{Au}$=8 µm$^{-1}$,\\
and that for PMMA is $\alpha_{PMMA}$=0.3 µm$^{-1}$. If the thickness of\\
PMMA is 3µm, and that of Au is 0.6 µm. What is the\\
volume dose (J/cm$^3$) at point A (see figure at right, A is at\\
the bottom of PMMA, below Au) if the intensity from\\
synchrotron radiation is 50 mW/cm$^2$ and exposure time is 40\\
sec?

1. (6 points) X-ray lithography dose. For 1keV x-ray

(λ=1.24nm), absorption coefficient for Au is αAu=8 µm^-1,

and that for PMMA is αPMMA=0.3 µm^-1. If the thickness of

PMMA is 3µm, and that of Au is 0.6 µm. What is the

volume dose (J/cm^3) at point A (see figure at right, A is at

the bottom of PMMA, below Au) if the intensity from

synchrotron radiation is 50 mW/cm^2 and exposure time is 40

sec?

Added by Kayla B.

University Physics with Modern Physics

Hugh D. Young 14th Edition

Instant Answer

Solved by Expert Aishwarya Krishnakumar

Step 1

First, we need to calculate the intensity of the x-ray beam after it passes through the PMMA layer. We can use the absorption coefficient of PMMA and the thickness of the layer to calculate the intensity reduction. Intensity after PMMA = Intensity before PMMA * Show more…

Show all steps

Thanks for your feedback!

Questions. (6 points) X-ray lithography dose. For 1 keV x-ray (=1.24 nm), the absorption coefficient for Au is Au=8 m-1. Synchrotron irradiation and that for PMMA is PMMA=0.3 m-1. If the thickness of PMMA is 3 um, and that of Au is 0.6 um. What is the Mask volume dose (J/cm3) at point A (see figure at right, A is at the bottom of PMMA, below Au) if the intensity from synchrotron radiation is 50 mW/cm2 and the exposure time is 40 sec? Resist Substrate