It is MEMS class.
PROBLEMS: MUMPs Design rules - http://www.memscap.com/en_mumps.html
For the MUMPs design illustrated below, draw a single 2-D image of the fabrication process for line #1 below. Label thicknesses, heights, etc. on your image.
#2
#1
10KV
0.68KX14.70019
AFIT