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4) The electrode voltage at $Z_{out}$ has both RF and DC components whenever a plasma exists. The DC portion of that voltage (the \"DC Bias\" ) is separated from the total electrode voltage at $Z_{out}$ using a capacitor and inductor in series. (See $L_{RF}$ and $C_{dc}$ in Fig. 1.) The DC Bias can then be measured across $C_{dc}$ since almost all of the RF voltage is blocked by $L_{RF}$. That is to say: Almost all of the RF voltage at $Z_{out}$ is dropped across $L_{RF}$ and much less across $C_{dc}$. In addition, all of the DC voltage is dropped across $C_{dc}$ and none across $L_{RF}$. I want you to calculate the fractional reduction in the RF voltage across $C_{dc}$ enabled by $L_{RF}$. Assume that $L_{RF} = 100$ uH, $C_{dc} = 1$ uF and the RF frequency is 13.56 MHz. a. Write down the impedances for $L_{RF}$ and $C_{dc}$ at the RF Frequency. b. What is the RF voltage division between $L_{RF}$ and $C_{dc}$? c. What is the DC voltage division between $L_{RF}$ and $C_{dc}$?

          4) The electrode voltage at $Z_{out}$ has both RF and DC components whenever a plasma exists.
The DC portion of that voltage (the \"DC Bias\" ) is separated from the total electrode voltage
at $Z_{out}$ using a capacitor and inductor in series. (See $L_{RF}$ and $C_{dc}$ in Fig. 1.) The DC Bias can
then be measured across $C_{dc}$ since almost all of the RF voltage is blocked by $L_{RF}$. That is to
say: Almost all of the RF voltage at $Z_{out}$ is dropped across $L_{RF}$ and much less across $C_{dc}$. In
addition, all of the DC voltage is dropped across $C_{dc}$ and none across $L_{RF}$. I want you to
calculate the fractional reduction in the RF voltage across $C_{dc}$ enabled by $L_{RF}$. Assume that
$L_{RF} = 100$ uH, $C_{dc} = 1$ uF and the RF frequency is 13.56 MHz.
a. Write down the impedances for $L_{RF}$ and $C_{dc}$ at the RF Frequency.
b. What is the RF voltage division between $L_{RF}$ and $C_{dc}$?
c. What is the DC voltage division between $L_{RF}$ and $C_{dc}$?

$4) The electrode voltage at Zout has both RF and DC components whenever a plasma exists. The DC portion of that voltage (the D̈C Bias)̈ is separated from the total electrode voltage at Zout using a capacitor and inductor in series. (See LRF and Cdc in Fig. 1.) The DC Bias can then be measured across Cdc since almost all of the RF voltage is blocked by LRF. That is to say: Almost all of the RF voltage at Zout is dropped across LRF and much less across Cdc. In addition, all of the DC voltage is dropped across Cdc and none across LRF. I want you to calculate the fractional reduction in the RF voltage across Cdc enabled by LRF. Assume that LRF = 100 uH, Cdc = 1 uF and the RF frequency is 13.56 MHz. a. Write down the impedances for LRF and Cdc at the RF Frequency. b. What is the RF voltage division between LRF and Cdc? c. What is the DC voltage division between LRF and Cdc?$

Added by David A.

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