Cantilever-based sensor. The cantilever is made of polysilicon on a silicon substrate. It has a base and an extended beam (150 μm long, 1.5 μm thick) as shown in the figure. The coupling electrode is made of gold (100 nm thick). There is a 1.4 μm air gap between the electrode and cantilever.
a) How many masks are required for the process? Design and draw the masks, indicate tone for each region and mark the dimensions.
b) Design the fabrication process and draw a flow chart (cross-sectional view along the red dashed line). For each step: 1) select materials, 2) select appropriate tools, 3) describe the process.
Cantilever-based sensor. The cantilever is made of polysilicon on a silicon substrate. It has a base and an extended beam (150 μm long, 1.5 μm thick) as shown in the figure. The coupling electrode is made of gold (100 nm thick). There is a 1.4 μm air gap between the electrode and cantilever.
a) How many masks are required for the process? Design and draw the masks, indicate tone for each region and mark the dimensions.
b) Design the fabrication process and draw a flow chart (cross-sectional view along the red dashed line). For each step: 1) select materials, 2) select appropriate tools, 3) describe the process.
Electrode Force
50 μm
Cantilever beam
10 μm
150 μm
3 μm
Substrate
30 μm