Question
Repeat Problem $10.23$ for an ideal MOS capacitor with a $\mathrm{p}^{+}$ polysilicon gate and an n-type silicon substrate doped at $N_{d}=5 \times 10^{14} \mathrm{~cm}^{-3}$.
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876 \times 10^{-7}$ F/cm$^2$ at a frequency of 1 Hz. Show more…
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An ideal MOS capacitor with an $\mathrm{n}^{+}$ polysilicon gate has a silicon dioxide thickness of $t_{a x}=12 \mathrm{~nm}=120 \AA$ on a p-type silicon substrate doped at $N_{a}=10^{16} \mathrm{~cm}^{-3}$. Determine the capacitance $C_{a x}, C_{F B}^{\prime}, C_{m i n}^{\prime}$, and $C^{\prime}($ inv $)$ at $(a) f=1 \mathrm{~Hz}$ and $(b) f=1 \mathrm{MHz}$. (c) Determine $V_{F B}$ and $V_{T} .(d)$ Sketch $C^{\prime} / C_{a x}$ versus $V_{G}$ for parts $(a)$ and $(b)$.
Consider a MOS capacitor with an $\mathrm{n}^{+}$ polysilicon gate and $\mathrm{n}$ -type silicon substrate. Assume $N_{a}=10^{16} \mathrm{~cm}^{-3}$ and let $E_{F}-E_{c}=0.2 \mathrm{eV}$ in the $\mathrm{n}^{+}$ polysilicon. Assume the oxide has a thickness of $t_{0 x}=300 \AA$. Also assume that $\chi^{\prime}$ (polysilicon) $=\chi^{\prime}$ (singlecrystal silicon). ( $a$ ) Sketch the energy-band diagrams (i) for $V_{G}=0$ and (ii) at flat band. (b) Calculate the metal-semiconductor work function difference. $(c)$ Calculate the threshold voltage for the ideal case of zero fixed oxide charge and zero interface states.
Repeat Problem $10.13$ for an $\mathrm{n}$ -type silicon substrate if the measured threshold voltage is $V_{T}=-0.975 \mathrm{~V}$. Determine the $\mathrm{n}$ -type doping concentration.
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